Equipment modules

A module represents a functional part of equipment. Every equipment item has a main module; complex tools can add load ports, transport units, process chambers, or other locally defined module types.

Modules have their own name, number, serial/manufacturer information, type, status history, label, parameters, properties, assets, facilities, groups, function, and external activity. A module can be marked inactive or excluded from reservations without making the whole equipment inactive.

Process definitions connect to modules, not directly to the equipment shell. A process-capable module can therefore show linked processes, recipes, templates, runs, and monitored processes. Operational issues, ECNs, status changes, facilities, and external activity are also recorded at module level and aggregated on the equipment page.

Use one module when the tool behaves as a single unit. Add modules only when functions need different parameters, statuses, reservations, processes, or maintenance context.