Monitored Processes (SPC)

Introduction

In SoloDB SPC tests (Statistical Process Control) is available via a component called Monitored Processes. There are 2 types of monitored processes available

• Scheduled Monitored Processes

• In Run Monitored Processes

In both cases steps are executed in a run and the results obtained via measurements in the run can be collected per monitored process. The results can be used to generate a chart or table and when the results are above are blow a given target actions can be defined.

The list of monitored processes can be found via Equipment > Monitored Processes

Monitor process

A monitored process is a run template where the process to execute a SPC test is defined. The monitored process consists of steps where the process is defined, like the deposition of a layer or an etch step. Inside the monitored process also a Requirement step should be added in which the requirements for the monitored process are defined.

In this requirement step the definition can be defined, the method to obtain the measurement result and the targets ( including min/max values) can be defined.