Monitored Processes (SPC)

Introduction

SoloDB supports Statistical Process Control through monitored processes. A monitored process can run on a schedule or as part of another run.

In both cases steps are executed in a run and the results obtained via measurements in the run can be collected per monitored process. The results can be used to generate a chart or table and when the results are above are blow a given target actions can be defined.

Open Equipment > Other > Monitored Processes to manage scheduled monitors. Monitors tied to a specific module are also available from the equipment module page. See Monitored processes and SPC for the complete workflow.

Monitor process

A monitored process is a run template where the process to execute a SPC test is defined. The monitored process consists of steps where the process is defined, like the deposition of a layer or an etch step. Inside the monitored process also a Requirement step should be added in which the requirements for the monitored process are defined.

In this requirement step the definition can be defined, the method to obtain the measurement result and the targets ( including min/max values) can be defined.