Processes
All processes which can be one in a run are available in the process library, which can be found in the main menu item Processes. The processes are categorised in three levels
The Process Family are the lowest level and per process family an equipment module can be selected on which the process family can be executed. This results on the following example processes:
Process Type | Process Category | Process Family | Process |
|---|---|---|---|
Fabrication | Lithography | Resist spinning | Resist spinning: S1828, 30s on Level 2 Spinner |
Fabrication | Lithography | Development | OPD5262, 30s on Wet Bench |
Fabrication | Metal deposition | Evaporation | Evaporation: Al 20nm on PLS 580 |
Characterisation | Optical Inspection | Microscope | Microscope images on Small optical microscope |
Characterisation | Measurements | CV Measurement | CV Measurement on Small CV measurement tool |
There are more ways of organising the processes and this example should ony be considered as a guide
There are also some HOWTOs available (more will follow)