All processes which can be one in a run are available in the process library, which can be found in the main menu item Library. The processes are categorised in three levels

The Process Family are the lowest level and per process family an equipment module can be selected on which the process family can be executed. This results on the following example processes:

Process Type Process Category Process Family Process
Fabrication Lithography Resist spinning Resist spinning: S1828, 30s on Level 2 Spinner
Fabrication Lithography Development OPD5262, 30s on Wet Bench
Fabrication Metal deposition Evaporation Evaporation: Al 20nm on PLS 580
Characterisation Optical Inspection Microscope Microscope images on Small optical microscope
Characterisation Measurements CV Measurement CV Measurement on Small CV measurement tool

There are more ways of organising the processes and this example should ony be considered as a guide

There are also some HOWTOs available (more will follow)